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Thomas West Inc.

Carrier Films

TWI SCF 815 pad for SFI / Novellus 676/776 Tool

Ideally, carrier film performs in CMP over hundreds of runs, without any major problems such as delamination or difficulty being removed.

Carrier Pads for All CMP Tools

Recommended Pad: CF815, CF21

TWI carrier pads (a.k.a. Wafer Backing Films) are used in production in Asia, Europe and North America, on Ebara, Speedfam, and Strasbaugh tools for 200mm and 300mm wafers.

For more detailed information TWI carrier CMP pads, contact carrierCMP@ThomasWest.com